题目/Title：Design optimization and modeling of on-chip RF inductors in 0.13µm and 90nm standard CMOS

作者/Author：
                        Fan Zhang,Zhihua Wang,Xin Wang,He Tang,Qiang Fang,A. Wang,Wei Chen,Lee Yang,Bin Zhao, G. Zhang, Xingang Wang

会议/Conference：MWSCAS 2009

地点/Location：Cancun

年份/Issue Date：2009.2-5 Aug.

页码/pages：pp. 975 - 978

摘要/Abstract：
This paper discusses general procedures for simulation, design optimization, measurement and modeling of accurate and scalable on-chip RF spiral inductors in standard foundry CMOS for industrial applications. Electro-magnetic (EM) solver is used to simulate and optimize design of a library of inductors with various dimensions and specifications aiming to provide accurate and scalable inductors for typical industrial RF IC designs. A two-step de-embedding method is introduced to ensure precise accurate testing results spanning from 0.1 nH to 20 nH. SPICE inductor parameter extraction based on an improved 2-pi circuit model is conducted to generate accurate BSIM device models for RF IC designs. Design examples in 0.13 mum and 90 nm CMOS are presented.