题目/Title：0.18-μm CMOS工艺实现的毫米波宽带片上天线
                        A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS

作者/Author：孟祥雨,池保勇,贾海昆,况立雪,贾雯,王志华
                        Xiangyu Meng,Baoyong Chi,Haikun Jia,Lixue Kuang,Wen Jia,Zhihua Wang

期刊/Journal：半导体学报 Journal of Semiconductors

年份/Issue Date：2013.Oct.

卷（期）及页码/Volume（No.）&pages：Vol.34, No.10, pp. 105010-1 - 105010-5

摘要/Abstract：

A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS with a low-resistivity (10 Ωcenterdotbm) silicon substrate is presented. The wideband is achieved by reducing the Q factor and exciting the high-order radiation modes with size optimization. The antenna uses an on-chip top layer metal as the patch and a probe station as the ground plane. The on-chip ground plane is connected to the probe station using the inner connection structure of the probe station for better performance. The simulated S11 is less than −10 dB over 46–95 GHz, which is well matched with the measured results over the available 40–67 GHz frequency range from our measurement equipment. A maximum gain of −5.55 dBi with 4% radiation efficiency at a 60 GHz point is also achieved based on Ansoft HFSS simulation. Compared with the current state-of-the-art devices, the presented antenna achieves a wider bandwidth and could be used in wideband millimeter-wave communication and image applications.